Inquiry: Canon FPA 3000i4 Coupling BS2-9029 & TEL ACT-8 Cleaning Plate P/N 1985-423471-13

Semiconductor
1

Hello,

I am reaching out to request technical specifications and sourcing information for the following parts:

  1. Canon FPA 3000i4 Coupling BS2-9029

    • Application: Projection Photolithography Stepper

    • Diameter: 19.08 mm

    • Length: 19 mm

    • Quantity: 1 piece

  2. TEL Clean Track ACT-8 Bowl Cleaning Plate

    • Manufacturer: TEL

    • Part No.: 1985-423471-13

    • Coat Jig Washer (Cleaning) 8" Assy

    • Diameter: 200 mm

    • Quantity: 3 pieces

Could someone provide detailed technical information, recommended suppliers, or advice on availability?
We are based in India and would also like to understand if shipping to India is possible.

Thank you in advance for your help.

2

Hello management,

Welcome to the DigiKey TechForum.

Looks like we don’t sell the stepper FPA-3000 i4 from Canon but I found some technical information on it here: Canon FPA-3000 i4 Specification | SERVTECH Canon Steppers

We also do not sell the Clean Track ACT-8 from TEL either. All I could find on that is from TEL’s website: Coater/Developer ACT™ Series | Products and Service(products) | Tokyo Electron Ltd.

Please note that DigiKey does ship to India for most of the products we carry but the above products we do not carry. Sorry for the inconvenience.