Microchip PIC technology node(s)

What technology (process) node(s) do Microchip PIC18, dsPIC33. PIC32MX/MZ dies use? I cannot find this info at Microchip. I saw one article that suggests 130 nm for the 16 bit dies. Thanks!

I believe PIC18 is 135nm, I am not sure if dsPIC and PIC32 use smaller or not, but I would think if you post on their MicroChip Forum they will answer it.

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