Sensirion Onepager Gas chromatography
Water ingress and high humidity monitoring for more reliability
From clinical research to forensics, separating the different compounds of a gas mixture is a key step in various processes. Gas chromatography is a major method for such applications, providing fast, precise and versatile operation. Sensirion’s mass flow controllers offer accurate measurements with unmatched repeatability down to a few liters/hour.
Application challenges
-
Accurate mixing of the carrier and sample is vital for a precise result
-
Various carrier gases can be used, and the system requires lengthy factory calibration
-
Repeatability is crucial to ensure a reliable measurement
Sensirion’s solution
-
High accuracy, repeatability, and fast response time
-
Factory-calibrated digital sensor for multiple gases and temperatures
-
Unmatched repeatability down to sub-ml/min
Sensirion sensor solution:
SFC5500 versatile mass flow controller with best-in-class performance
Additional sensor features
-
Both mass flow meter and mass flow controller versions available
-
Several communication interfaces and fittings available
Other applications
Thermal Analysis
Mass Spectrometry
Semiconductor Manufacturing
FAQs
- What gases can the sensor be calibrated for?
Standard calibration gases: Air/N2, H2, O2, He, Ar, CO2
On request we calibrate by gas conversion for: SF6, C4F8, CF4, NH3, SiH4, N2O, O3, CO, CH4, CH3F, Xe, Ne, Kr (+ other gases on request, not compatible with aggressive gases)
- What are the wetted materials?
Body: Aluminum; On request: Stainless steel or plastic
Sensor: Silicon (Si), Silicon Oxide (SiOx), Silicon Nitride (Si3N4), Stainless steel, Glass, Glob Top
Sealing: FKM (Fluorine Kautschuk Material); On request: EPDM (Ethylene Propylene Diene Monomer rubber) / FFKM
Valve: Brass, FKM; On request: Stainless steel, EPDM/FFKM
- Which fittings can be used?
Downmount fittings with manifold
- Which communication interfaces are available?
RS485, DeviceNet, IO-Link, SHDLC, Modbus
- Is the sensor’s response compensated for temperature and pressure?
The sensor is temperature compensated.